No matter how science fiction you think EUV lithography is, it's more science fiction than than that. (Even just the free portion of this post on EUV optics is mind-blowing.) frontiermap.substack.com/p/zeiss-and-...
ZEISS and the Optics of ASML’s EUV Machines
Every ASML EUV scanner uses ZEISS illumination and projection optics to shape the beam and form the image on the wafer
frontiermap.substack.com